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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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纳米zro2薄膜的制备与表征
Keywords: 水热法,纳米zro2薄膜,单斜相zro2
Abstract:
？用水热盐溶液水解法可合成含有单斜相晶态纳米zro2颗粒的zro2溶胶体.用匀胶法制备的纳米zro2薄膜厚度约160nm,折光率为1.56.纳米zro2薄膜表面质量良好,无表面裂隙,台阶仪研究表明薄膜表面粗糙度算术差ra=2.7nm,均方根差rq=3.7nm.以zro2为高折射率膜层,碱催化的溶胶凝胶sio2为低折射率膜层,制备了sio2/zro2多层高反射率薄膜,10周期的sio2/zro2多层膜系,在1.06um波段处透过率为1%,薄膜表面抗激光损伤阈值约15j/cm2(1.06um,2.5ns高功率激光作用下).
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