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立方mgxzn1-xo晶体薄膜的制备和性能

Keywords: 无机非金属材料,mgxzn1-xo晶体薄膜,低温

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Abstract:

?采用低温物理沉积技术在二氧化硅衬底(sio2/si(100))和石英玻璃上生长出了mgxzn1-xo(x>0.5)晶体薄膜,并用扫描电镜(sem)、原子力显微镜(afm)、x射线衍射(xrd)图谱和紫外--可见光透射光谱对其进行了表征.结果表明,在sio2/si(100)和石英玻璃衬底上沉积的mgxzn1-xo(x>0.5)晶体薄膜表面平整,均呈立方结构,且具有高度的(001)择优取向.立方mgxzn1-xo薄膜具有从紫外到近红外波段良好的透明性,折射率为1.7~1.8,随着波长的增大或mg组分的增大而降低.

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