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OALib Journal期刊
ISSN: 2333-9721
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考虑二维es势垒的薄膜生长动力学montecarlo模型
Keywords: 材料科学基础学科,薄膜生长,动力学montecarlo模型,二维es势垒,形貌
Abstract:
？考虑了原子在发生层间扩散过程中ehrlich--schwoebel势垒的作用,构造了四边形基底表面上薄膜三维生长的动力学montecarlo(mc)模型。在这个模型中,原子表面运动的三种动力学过程包括沉积、扩散和脱附过程,它们相互影响又相互独立,依据各自的概率发生。在不同生长条件下,模拟出薄膜的三种生长模式以及相应的薄膜三维生长形貌图。对计算结果的分析表明,es势垒和在es势垒作用下基底温度和沉积速率等因素对薄膜的三维生长模式有重要影响。
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