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OALib Journal期刊
ISSN: 2333-9721
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基于频谱校正技术的光学相干振动和热变形层析系统研究
DOI: 10.13232/j.cnki.jnju.2014.02.008
Keywords: 频域光学相干层析,频谱校正技术,非接触检测,压电驱动器在线标定
Abstract:
本文提出采用基于频谱校正技术的增强型频域光学相干层析系统（eoct）eoct系统采用基于ccd的宽带光谱仪以及宽带低相干的白光，所以这个增强型光学相干层析系统具有很高的检测分辨率，可达到0.9微米精度。但是，由于光谱信号作傅里叶变换的过程中产生了能量泄露，从而导致振动或热变形检测存在一定程度的误差。为了解决这个问题，本文提出采用一种频谱校正技术来校正此误差。从振动、热变形以及压电驱动器标定等实验的结果可知该方法的检测精度最高可达0.1微米。因此，自研制的eoct系统在非接触振动、热变形测量以及压电驱动器在线标定等领域具有很好的应用前景。
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