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nb5n6microbolometer太赫兹检测器

DOI: 10.13232/j.cnki.jnju.2014.03.004

Keywords: nb5n6薄膜,microbolometer,太赫兹检测器,太赫兹成像

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Abstract:

?随着太赫兹科学技术的快速发展,太赫兹检测器件的性能也在不断提高,为微弱信号的检测和太赫兹成像奠定了坚实的基础。本文针对nb5n6薄膜材料,研制了nb5n6microbolometer阵列芯片及其基于这种芯片的太赫兹准光型接收机。单个nb5n6microbolometer的直流电压响应最高达-760v/w,对应的直流噪声等效功率(nep)为1.3×10-11w/√hz。在实际系统中,由串联结构的nb5n6microbolometer构成的准光接收机,光学电压响应率高达428v/w,对应的光学噪声等效功率(nep)为2.3×10-11w/√hz。nb5n6microbolometer太赫兹检测器室温工作、工艺简单、检测灵敏度高,响应时间快,便于集成超大规模阵列,为太赫兹信号检测提供了一种有效的途径。

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