He Lin, Xu Yong-ping, Palaniapan M.A CMOS readout circuit for SOI resonant accelerometer with 4 μg bias stability and 20 μg/resolution[J].IEEE Journal of Solid-State Circuits, 2008, 43(6):1480-1490.
[2]
Yin Tao, Yang Hai-gang, Zhang Chong, et al.A low-noise readout circuit for MEMS vibratory gyroscope[A].William C T.IEEE International Conference on Nano/Micro Engineered and Molecular Systems[C].Sanya:IEEE Press, 2008.124-127.
[3]
CHANG Ming-hui, HUANG Han-pang.A novel offset cancellation based on parasitic-insensitive switched-capacitor sensing circuit for the out-of-plane single-gimbaled decoupled CMOS-MEMS gyroscope[J].Sensors, 2013, 13(3):3568-3587.
[4]
Armenise M N, Ciminelli C, Dell''olio F, et al.Advances in Gyroscope Technologies[M].Bari:Springer, 2010.83-85.
[5]
董林玺, 颜海霞, 钱, 等.倾斜梳齿的MEMS电容式传感器惯性脉冲响应特性研究[J].电子学报, 2008, 36(5):1035-1040. Dong Lin-xi, Yan Hai-xia, Qian Xian, et al.Study of inertial pulse response of MEMS capacitive accelerometer with non-parallel combs[J].Acta Electronica Sinica, 2008, 36(5):1035-1040.(in Chinese)
[6]
Lemkin M, Boser B E.A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics[J].IEEE Journal of Solid-State Circuits, 1999, 34(4):456-468.
[7]
Yun W.A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry[D].Berkeley:Univ of California at Berkeley, 1992.45-47.
[8]
Wongkomet N, Boser B E.Correlated double sampling in capacitive position sensing circuits for micromachined applications[A].Keitaro Sekine.The 1998 IEEE Asia-Pacific Conference on Circuits and Systems[C].Chiangmai:Sangsilp Printing Ltd, 1998.723-726.
[9]
Jiang Xue-song, Seeger J I, Kraft M, et al.A monolithic surface micromachined z-axis gyroscope with digital output[A].David Scott.Symposium on VLSI Circuits[C].Gaithersburg:Widerkehr and Associates, 2000.16-19.
[10]
Lu T C, Huang Y J, Chou H P.A novel interface circuit for capacitive sensors using correlated double sampling demodulation technique[A].Mathilde Benveniste.Second International Conference on Sensor Technologies and Applications[C].Cap Esterel:IEEE Computer Society, 2008.396-400.[LL]
[11]
Zhang Chong, Yin Tao, Wu Qi-song, et al.A large dynamic range CMOS readout circuit for MEMS vibratory gyroscope[A].Pietro Siciliano.Electronic Proceedings of the Seventh IEEE Sensors Conference[C].Lecce:The Printing House Inc, 2008.1123-1126.
[12]
Fang Ran, Lu Wen-gao, Liu Chang, et al.A low-noise interface circuit for MEMS vibratory gyroscope[A].Tang Ting-ao.10th IEEE International Conference on Solid-State and Integrated Circuit Technology[C].Shanghai:IEEE Press, 2010.1456-1458.
[13]
Sun Hong-zhi, Jia Ke-miao, Liu Xue-song, et al.A CMOS-MEMS gyroscope interface circuit design with high gain and low temperature dependence[J].IEEE Sensors Journal, 2011, 11(11):2740-2748.
