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气浮直线驱动平台定位误差影响因素研究

DOI: 10.3969/j.issn.1006-7043.201403075

Keywords: 机床技术, 气浮直线运动平台, NURBS, 几何误差, 定位误差, 误差补偿

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Abstract:

为实现气浮直线驱动平台定位误差的精确补偿,对气浮直线驱动平台定位误差的影响因素进行了研究。试验测量了气浮直线驱动平台的定位误差,发现其测量结果中包含有随机误差、时变的热误差以及与位置相关的几何误差。对定位误差进行补偿的前提是根据不同误差的性质准确地将其分离,否则就会存在少补或过补的现象。本文利用统计学的方法求出随机误差的数学期望,对测量数据的均值进行修正,消除随机误差对测量值的影响。进一步对修正后的均值进行多项式拟合,将位置相关的几何误差和时变的热误差分离,并发现时变的热误差对超精密气浮直线驱动平台的定位误差影响很显著,需要进行在线实时补偿。提出使用NURBS曲线插值的方法,建立位置相关的几何误差的预测模型,从而实现对位置相关的几何误差进行精确的预测和离线误差补偿。

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