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用于高空气象探测的聚酰亚胺薄膜湿敏电容研究

, PP. 69-76

Keywords: 湿度传感器,湿敏电容,聚酰亚胺,MEMS

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Abstract:

设计制作了一种基于MEMS技术,可应用于高空湿度探测的薄膜湿敏电容.电容采用三明治结构,聚酰亚胺薄膜作为湿度敏感层材料,金作为上、下电极.测试结果表明,在15{\%}RH$\sim$95{\%}RH的全量程范围内,湿敏电容的合格率$\geqslant$80{\%},灵敏度约为0.29pF/{\%}RH,线性误差$<$1.5{\%}RH,湿滞较小,响应时间小于4~s,温度系数好,具有良好的长期稳定性.研究表明,制作的湿敏电容综合指标良好,适合批量生产,可以满足高空气象探测要求.

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