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As掺杂碲镉汞富碲液相外延材料特性的研究

Keywords: 碲镉汞,霍尔效应,As掺杂,激活退火,双层模型

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Abstract:

对富碲液相外延As掺杂碲镉汞(HgCdTe)材料的研究发现,其电学性能存在着不稳定性,材料霍尔参数的实验数据与均匀材料的理论计算结果也不能很好的吻合.通过采用剥层变温霍尔测量和二次离子质谱(SIMS)测试对材料纵向均匀性进行检测的结果显示,外延材料中的As在高温富汞激活退火过程中具有向材料表面扩散的效应,导致在表面形成了高于主体层浓度1~2个量级的高浓度表面层,并导致了AsTe受主的浓度在HgCdTe薄膜中呈非均匀分布.考虑这一效应并采用双层模型的霍尔参数计算方法后,As掺杂HgCdTe液相外延材料的电学行为得到了较好的解释,并较为准确地获得了退火后材料表面层与主体层的受主浓度及受主能级等电学参数.

References

[1]  D. Chandra ;H. F. Schaake ;M.A. Kinch ;F. Aqariden ;C.F. Wan ;D.F. Weirauch ;H.D. Shih,Activation of Arsenic as an Acceptor in Hg_(1-x)Cd_xTe under Equilibrium Conditions,Journal of Electronic Materials?,2002, 31(7).
[2]  S. VELICU ;C.H. GREIN ;P.Y. EMELIE ;A. ITSUNO ;J.D. PHILIPS ;P. WIJEWARNASURIYA,MWIR and LWIR HgCdTe Infrared Detectors Operated with Reduced Cooling Requirements,Journal of Electronic Materials?,2010, 39(7).
[3]  王珏,The Influence of Impurities and Defects on physical Properties of Hg1-xCdxTe Crystal and the Control Methods,上海:中国科学院上海技术物理研究所,1989.
[4]  Hansen G L;Schmit J L;Casselman T N,Energy Gap versus Alloy Composition and Temperature in Hg1-x Cdx Te,Journal of Applied Physics,1982(10).
[5]  WANG LARRY ;ZHANG LILY H. ;LI JUN,New Techniques in SIMS Analysis of HgCdTe Materials,Journal of Electronic Materials?,1999, 28(6).
[6]  D. CHANDRA ;D.F. WEIRAUCH ;H.F. SCHAAKE ;M.A. KINCH ;F. AQARIDEN ;C.F. WAN ;H.D. SHIH,Growth of Very Low Arsenic-Doped HgCdTe,Journal of Electronic Materials?,2005, 34(6).
[7]  Bubulac L O;Viswanathan C R,Diffusion of As and Sb in HgCdTe,Journal of Crystal Growth,1992(3-4).
[8]  S.H. SHIN ;J.M. ARIAS ;M. ZANDIAN ;J.G. PASKO ;L.O. BUBULAC ;R.E. DE WAMES,Enhanced Arsenic Diffusion and Activation in HgCdTe,Journal of Electronic Materials?,1995, 24(5).
[9]  Shi X H;Rujirawat S;Ashokan R Ionization Energy of Acceptors in As-doped HgCdTe Grown by Molecular Beam Epitaxy [J] 1998(5)
[10]  Higgins W M;Pultz G N;Roy R G,Standard Relationships in the Properties of Hg1-x Cdx Te,Journal of Vacuum Science and Technology A:Vacuum Surfaces and Films,1989(02).
[11]  Lou L F;Frye W H,Hall Effect and Resistivity in LiquidPhase-Epitaxial Layers of HgCdTe,Journal of Applied Physics,1984(08).
[12]  Kalisher M H,The Behavior of Doped Hg1-xCdx Te Epitaxial Layers Grown from Hg-rich Melts,Journal of Crystal Growth,1984(1-2).

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