OALib Journal期刊
ISSN: 2333-9721
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硅晶闸管烧结应力的红外光弹性研究
Keywords: 硅应力烧结光弹性晶闸管红外光弹性
Abstract:
参考热弹性理论和复合材料层间应力理论,研究了Si片Al箔/Mo片烧结后的层间应力及硅片中的应力,热膨性能不同引起的热应力成硅片中的中间和边缘区域分布情况不一样,推导出适用于边级区域的应力计算表达式,用红外光弹测量获得晶闸管烧结工艺制备样品的应力分布光弹图,理论能较好地解释实验结果。
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