背面直接取样结构电光取样的空间分辨率
Keywords: 空间分辨率电光取样高斯分布背面直接取样结构测量电光晶体集成电路光斑
Abstract:
介绍了电光取样系统空间分辨率的测量原理和方法，实验结果表明，建立的电光取样仪的空间分辨率为3μm。
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