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微辐射热计的光学与热学设计

Keywords: 微辐射热计光学设计热学设计红外吸收率红外焦平面阵列微测辐射热计红外辐射

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Abstract:

针对四臂微桥结构的微辐射热计的光学和热学设计,分析了Si02红外吸收层/poly-Si热敏感薄膜电阻层/Si02支撑薄膜层的多层薄膜的光学特性,研究了Si02红外吸收层的厚度对多层膜系平均红外吸收率的影响。与常规设计思想不同的是,没有假设微辐射热计的平均红外吸收率一定,而将不同厚度的Si02红外吸收层所对应的膜系平均红外吸收率用于微桥的热学设计中,通过有限元分析软件ANSYS5。7,得到Si02红外吸收层的最佳厚度,并对微桥支撑臂进行了优化设计。

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