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(Ba0.5Sr0.5)TiO3铁电薄膜的制备工艺及电学性质研究

Keywords: (Ba0.5Sr0.5)TiO3铁电薄膜制备工艺电学性质溶胶-凝胶法介电性能漏电流密度钛酸锶钡

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Abstract:

采用溶胶凝胶方法制备出纯立方钙钛矿相、介电性能和漏电流特性良好的(Ba0.5Sr0.5)TiO3铁电薄膜.研究发现,随着烧结温度的升高,(Ba0.5Sr0.5)TiO3薄膜纯度和结晶度增高,介电常数提高,漏电流密度降低.在750℃进行保温1h热处理的薄膜性能较好且稳定:在室温下测得薄膜介电常数为250,介电损耗为0.030,漏电流密度为6.9×10-8A/cm2.较高的介电常数、较低的漏电流密度可能源于良好的纯度和结晶度.进一步研究表明,薄膜导电遵从空间电荷限制电流机制.

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