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提高深度剖析拉曼光谱的纵向分辨能力

Keywords: 纵向分辨能力共焦显微拉曼光谱仪深度剖析激光晶化微晶硅薄膜卷积模型薄膜分析

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Abstract:

使用适当似从理论上给出了共焦显微拉曼光谱仪的纵向仪器响应函数,针对相对薄(几个μm)的样品(诸如半导体薄膜材料)给出了一个简化的卷积模型,利用共焦显微拉曼光谱的深度剖析方法,研究了激光晶化后的非晶硅薄膜,并利用反卷积算法,提高了对薄膜纵向结构的分辨能力,发现了激光晶化产生的纳米微晶硅仅位于薄膜中间。

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