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面阵CCD探测的全自动椭圆偏振光谱系统研究

Keywords: 面阵CCD探测全自动椭圆偏振光谱系统单色仪光谱仪椭偏仪光学常数测量方法

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Abstract:

给出了一种椭圆偏振光谱的快速测量方法,并使得实验系统的结构更为紧凑和小型化,减轻了重量,研究中采用了由面阵型CCD探测器和平面多光栅组成的光谱仪,无需光栅扫描,就能够在很短时间内对光谱进行快速准确的数字凝视式成像,光谱分辨精度优于1.0mm,显著提高了系统工作的可靠性和效率,系统采取了将CCD光谱仪后置的方式,研究并解决了从物理光学原理,器件设计和加工、系统调试和定标、软件编制以及到光谱测量和数据分析等一系列问题,实验中对典型贵金属Au的光学常数谱进行了测量,获得了满意的结果。

References

[1]  Aspnes D E. In: Palik E D, ed. Handbook of Optical Constants of Solids. Orlando: Academic Press, 1985
[2]  Aspnes D E. Fourier transform detection system for rotating-analyzer ellipsometer. Optical Communcations, 1973, 8: 222-225
[3]  Aspnes D E. High precision scanning ellipsometer. Apply Optics, 1975, 14: 220-228
[4]  Vina L, Umbach C, Cardona M. Ellipsometric studies of electric interband transitions in CdxHg1-xTe. Physics Review B, 1984, 29: 6752-6760
[5]  Chen L Y, Lynch D W. Scanning ellipsometer by rotating polarizer and analyzer. Apply Optics, 1987, 26: 5221-5228
[6]  Woollam J A, Snyder P G, Rost M C. Variable angle spectroscopic ellipsometry: a nondestructive characterization technique for ultrathin and multiplayer materials. Thin Solid Films, 1988, 166: 317-323
[7]  Jellison G E, Modine F A. Two-channel polarization modulation ellipsometer. Apply Optics, 1990, 29: 959-973
[8]  Chen L Y, Feng X W, Su Y. Design of a scanning ellipsometer by synhchronous rotation of the polarizer and analyzer. Apply Optics, 1994, 33: 1299
[9]  Xia G Q, Zhang R J, Chen Y L. New design of the variable angel infrared spectroscopic ellipsometer using double Fourier transforms. Review Science Instrument, 2000, 71: 2677
[10]  Palik Edward D. Handbook of Optical Constant of Solids. London: Academic Press, 1985: 350

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