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纳米VO2薄膜的制备及其可见光透过率的改善

Keywords: 二氧化钒薄膜相变离子束溅射智能窗

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Abstract:

阐述了一种纳米VO2薄膜材料新型结构的制备方法.先用反应离子束溅射和退火工艺在玻璃基底上制备出具有相变特性的薄膜.HRTEM及KRD显示这种薄膜含有纳米量级的VO2颗粒,四探针测试电阻温度关系表明该类材料相变温度已经靠近室温,变化温度下测得的红外透过曲线表明该材料在相变前后具有良好的红外光开关特性.再针对该薄膜材料较低的可见光透过率,提出SiO2减反膜设计,取得了较好的实验效果.为开展VO2薄膜材料在智能窗类光电产品的应用研究打下了基础.

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