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一种具有高填充因子吸收层和低失调低噪声读出电路的红外探测系统

Keywords: 红外探测器,二极管,填充因子,吸收层,读出电路

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Abstract:

使用红外探测器及读出电路,研制成功非制冷红外探测系统.探测器用二极管作为温度传感器,使其与集成电路工艺相兼容.采用了新的器件结构,使得填充因子从20%提高到80%.器件的微机械结构面积为35μm×35μm.读出电路的失调电压为3μV.探测器的输出噪声为2μV.探测器的电压响应率为7894.7V/W,黑体探测率D*为1.56×109cmHz1/2/W,噪声等效温差为330mK,响应时间为27ms.

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