全部 标题 作者
关键词 摘要

OALib Journal期刊
ISSN: 2333-9721
费用:99美元

查看量下载量

相关文章

更多...

利用二次阳极氧化方法降低N型碲镉汞材料表面复合速度

Keywords: HgCdTe,二次氧化,少子寿命,表面复合

Full-Text   Cite this paper   Add to My Lib

Abstract:

利用微波反射光电导衰退法比较了采用一次阳极氧化和二次阳极氧化的N型碲镉汞材料的非平衡载流子寿命及其随温度的变化,通过与理论值进行比较拟合得到了碲镉汞材料表面复合速度随温度的变化曲线.结果发现,二次阳极氧化方法能够更好地降低材料表面悬挂键的密度,同时减少抛光引入的表面缺陷能级的数量,从而降低材料的表面复合速度,改善材料的非平衡载流子寿命,利于制造出高性能的HgCdTe红外探测器.

References

[1]  1Lopes V C, Syllaios A J, Chen M C. Minority carrier lifetime in mercury cadmium telluride[J]. Semiconductor.Sci.Technol. 1993,8: 824-841.
[2]  2Nemirovsky Y, Bahir G. Passivation of mercury cadmium telluride surfaces[J]. J. Vac. Sci. Technol. 1989,7(2): 450-459.
[3]  3CHU Jun-Hao. Narrow gap semiconductors Physics[M]. Beijing: Science Press. (褚君浩.窄禁带半导体物理学.北京: 科学出版社), 2005.
[4]  4ZHU Xi-Chen.Suface passivation of MCT detector[J]. Infrared Technology.(朱惜辰.碲镉汞探测器的表面钝化.红外技术).2001,23(5): 915.
[5]  5Nemirovsky Y,Kidron I. The interface between Hg1-xCdx and its native oxide[J]. Solid State Electron. 1979, 22: 831.
[6]  6Rhiger D R, Kvaas R E. Composition of native oxides etched surface on Hg1-xCdxTe[J]. J Vac. Sci. Technol. 1982, 21: 168-171.
[7]  7Wager J F, Rhger D R. Surface characterization of Hg0.7Cd0.3Te native oxides[J]. Vac. Sci. Technol. 1985,A3: 212-217.
[8]  8Lee S H, Shin H C, Lee H C, et al. New surface treatment method for improving the interface characteristics of Cd/Hg1-xCdxTe heterostructure[J]. Electron. Mater. 1997,26(6): 556-560.
[9]  9TANG Ying-Da. Influence of second anodization on characteristics of HgCdTe photonconductive detectors[J]. Semiconductors optoelectronics(汤英文.表面二次氧化对HgCdTe光导器件性能的影响.半导体光电).2007, 28(1): 72-75.
[10]  10Petersen P E. Auger recombination in Hg1-xCdxTe [J]. Appl. Phys. 1970, 41(8): 34-65.
[11]  11Reine M B, Maschhoff K R, Tobin S P, et al. The impact of characterization techniques on HgCdTe infrared detector technology[J].Semiconductor.Sci.Technol. 1993,8: 788-804.
[12]  12ZHANG Li-Yao, QIAO Hui, LI Xiang-Yang. Study of polishing parameter of HgCdTe wafers[J].Semiconductors Optoelectronic(张立瑶,乔辉,李向阳.HgCdTe材料的溴甲醇抛光工艺研究.半导体光电). 2012,33(5): 683-685.

Full-Text

Contact Us

service@oalib.com

QQ:3279437679

WhatsApp +8615387084133