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不同取向金刚石薄膜的红外椭圆偏振光谱特性研究

Keywords: CVD金刚石膜红外椭圆偏振光谱折射率消光系数

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Abstract:

采用红外椭圆偏振光谱仪对HFCVD方法所制备的不同取向金刚石薄膜的光学参数进行了测量.结果表明(001)取向金刚石薄膜具有较佳的光学质量,在红外波段基本是透明的.在2.5-12.5μm红外波长范围内,(001)取向金刚石膜的折射率和消光系数几乎不随波长的改变而变化,折射率为2.391,消光系数在10^-5范围内;对于(111)取向金刚石膜,其折射率和消光系数随波长的改变有微小变化,折射率和消光系数都低干(001)取向膜.通过计算拟合得到(001)取向金刚石膜的介电常数为5.83,优干(111)取向膜。

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