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短波红外InGaAs/InP光伏探测器系列的研制

Keywords: 光伏探测器短波红外InGaAs气态源分子束外延

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Abstract:

采用气态源分子束外延方法及应用有源区同质结构及较薄的组分渐变InxGa1-xAs缓冲层,研制了波长扩展的InGaAs/InP光伏探测器系列,其室温下的截止波长分别约为1.9μm,2,2μm.和2.5μm.对此探测器系列在较宽温度范围内的性能进行了细致表征,结果表明在室温下其R0A乘积分别为765,10.3和12.7Ωcm^2,比室温降低100K时其暗电流和R0A可改善约3个量级.瞬态特性测量表明此探测器系列适合高速工作,实测响应速度已达数十ps量级.

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