全部 标题 作者
关键词 摘要

OALib Journal期刊
ISSN: 2333-9721
费用:99美元

查看量下载量

相关文章

更多...

碲镉汞光伏型探测器的氢化处理研究

Keywords: 氢化,钝化,光伏探测器,碲镉汞,碲镉汞,光伏型探测器,氢化处理,研究,DETECTORS,HgCdTe,HYDROGENATION,器件的性能,结电阻,击穿电压,漏电,表面,界面态密度,界面产生,离子对,测试分析,SIMS,区域,注入,发生

Full-Text   Cite this paper   Add to My Lib

Abstract:

利用氢等离子体方法研究了氢化处理对碲镉汞光伏型红外探测器性能的影响,发现对ZnS介质层钝化的器件进行氢化处理后,器件的信噪比和零偏电阻有显著的改善.通过采取在氢化过程中进行光刻胶保护的方法,发现氢化作用主要发生在注入区域之外的P区一侧;通过SIMS测试分析发现氢化过程中H离子可以穿过ZnS层到达ZnS与碲镉汞的界面处.分析认为氢离子对ZnS和碲镉汞的界面产生钝化,降低了界面态密度,减弱了P型区的表面漏电,提高了PN结的击穿电压和结电阻,从而改善了器件的性能.

References

[1]  White J K,Musca C A,Lee H C,et al.Hydrogenation of ZnS passivation on narrow-band gap HgCdTe[J].Applied Physics Letter,2000,76(17):2448-2450.
[2]  Young Ho Kim,Tae Sik Kim,Redfern D A,et al.Characteristics of gradually doped LWIR diodes by hydrogenation[J].Journal of Electronic Material,2000,29(6):859-864.
[3]  Boieriu P,Grein C H,Velicu S,et al.Effects of hydrogen on majority carrier transport and minority carrier lifetimes in long wavelength infrared HgCdTe on Si[J].Applied Physics Letter,2006,88:062106.
[4]  Sitharaman S,Raman R,Durai L,et al.Effect of hydrogenation on the electrical and optical properties of CdZnTe substrates and HgCdTe epitaxial layers[J].Journal of Crystal Growth,2005,285:318-326.
[5]  Chen Y F,Chen W S.Influence of hydrogen passivation on the infrared spectra of Hg0.8Cd0.2Te[J].Applied Physics Letter,1991,59(6):703-705.
[6]  XU Xiang-Yan,LU Wei,CHEN Xiao-Shuang,et al.Numerical simulation of long wavelength photovoltaic HgCdTe photodiodes[J].J.Infrared Millim.Waves(徐向晏,陆卫,陈效双,等.光伏型长波HgCdTe红外探测器的数值模拟研究.红外与毫米波学报),2006,25(4):251-256.
[7]  SUN Tao,LIANG Jin-Sui,CHEN Xing-Guo,et al.Low frequency analysis of HgCdTe long wave photovoltaic detectors[J].J.Infrared Millim.Waves(孙涛,梁晋穗,陈兴国,等.HgCdTe长波光伏探测器的低频噪声研究.红外与毫米波学报),2005,24(4):272-276.

Full-Text

Contact Us

service@oalib.com

QQ:3279437679

WhatsApp +8615387084133