全部 标题 作者
关键词 摘要

OALib Journal期刊
ISSN: 2333-9721
费用:99美元

查看量下载量

相关文章

更多...

PZT铁电薄膜的低温原位生长

Keywords: 铁电薄膜,原位生长,射频溅射,钙钛矿相

Full-Text   Cite this paper   Add to My Lib

Abstract:

在溅射法预制备的LaNiO3/Si基片上,用射频溅射法在较低的衬底温度(235~310℃)和纯Ar气氛中原位生长Pb(Zr0.52Ti0.48)O3(PZT)薄膜.通过优化溅射功率、基片温度等工艺,最后在260℃的较低基片温度上成功制备出具有良好铁电性的PZT薄膜.使用X射线衍射(XRD)测试样品的结构,原子力显微镜观察其表面形貌,TD-88A标准铁电测试系统测试样品(Ar/PZT/LNO结构)的铁电性能.结果表明:(1)溅射功率110W,基片温度260℃时,原位沉积的PZT呈(111)、(200)取向;(2)上述工艺制备的PZT薄膜展现良好的铁电性,在5V测试电压时,其剩余极化为23.1uc/cm2,漏电流密度为1.34×10-4A/cm2.

References

[1]  WANG Qing-Ming,DING Yong-Ping,CHEN Qing-Ming,et al.Crystalline orientation dependence of nanomechanical properties of Pb (Zr0.52Ti0.48)O3 thin films[J].Appl.Phys.Lett.,2005,86 (16):162903
[2]  Hong J G,Song H W,Lee HC,et al.Structure and electrical properties of Pb (ZrxTil-x)O3 deposited on textured Pt films[J].J.Appl.Phys.,2001,90 (4):1962.
[3]  Hu Gu-Jin,HONG Xue-Kun,CHEN Jing,et al.Formation mechanism of periodical ferroelectric multilayers with high optical reflectivity[J].J.Infrared Millim.Waves(胡古今,洪学??,陈静,等.高反射率周期性铁电多层膜形成机理研究.红外与毫米波学报),2007,26(4):89-91.
[4]  LIN Tie,SUN Jing-Lan,JIAN Meng-Xiang,et al.Ferroelectric film thickness dependence of properties of infrared detector with all SiO2 Aerogel thermal insulation layer[J].J.Infrared Millim.Waves(林铁,孙兰,孟祥建,等.用SiO2气凝胶做隔热层的铁电薄膜红外探测器性能与铁电薄膜层厚度的关系.红外与毫米波学报),2007,26(5):319-321.
[5]  HUANG Wen,ZHANG Ying,JIANG Shu-Wen,et al.Monitoring of phase transformation and ferroelectric domains of crystallization process of PZT thin films[J].Journal of the Chinese Ceramic Society(黄文,张鹰,蒋书文,等.PZT薄膜晶化过程的相变及铁电畴监测.硅酸盐学报),2004,32(12):1500-1504.
[6]  Mark D Losegoal,Leslie H Jimison,Jon F Ihlefeld,et al.Ferroelectric response from lead zirconate titanate thin films prepareddirectly on low-resistivity copper substrates[J].Applied Physics Letters,2005,86:1729016.
[7]  Goux L,Gervais M,Catherinot A,et al.Crystalline and electrical properties of pulsed laser deposited BST on platinized silicon substrates[J],Journal of Non-Crystalline Solids,2002,303:194-200.
[8]  Jain M,Majumder S B,Katiyar R S,et al.Structural and dielectric properties of heterostructured BST thin films by sol-gel technique[J].Thin Solid Films,2004,447-448:537-541.

Full-Text

Contact Us

service@oalib.com

QQ:3279437679

WhatsApp +8615387084133