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不同组分La-Ni-O薄膜的红外光谱特性研究

Keywords: 镍酸镧薄膜红外光谱导电性晶格常数射频磁控溅射技术折射率消光系数

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Abstract:

采用射频磁控溅射和组合靶在260℃的(111)Si上制备了不同Ni、La含量比的La-Ni-O薄膜.通过拟合2~12.5μm波长范围的反射和透射光谱,得出了薄膜在此区间的折射率和消光系数.薄膜的折射率随波长的增长均呈现单调增大的变化趋势,并且随组分的变化,此趋势没有大的变化.而消光系数的邑散却对薄膜的组分具有很大的依赖性.实验结果同时表明,在La含量较高时,薄膜为无定型结构,并且具有较大的电阻率.当Ni、La含量比大于1:1.44后,薄膜具有(100)择优取向的赝立方钙钛矿结构,同时具有金属导电性.薄膜的晶面间距、电导率、折射率和消光系数随着Ni含量的增加具有相似的变化规律.并在Ni:La=1:1时,晶面问距和电阻率达到最小值.对所有实验现象,文中从LaNiO3薄膜的导电机理出发给出了理论分析,并取得了比较一致的结果.

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