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非致冷红外探测器用氧化钒多晶薄膜的制备

Keywords: 非致冷红外探测器氧化钒多晶薄膜离子束溅射镀膜电阻温度系数半导体材料薄膜结构

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Abstract:

采用离子束溅射镀膜和氧化工艺在Si(110)和石英衬底上制备了用于非致冷红外探测器阵列热敏材料的混合相氧化钒多晶薄膜.扫描电子显微镜(SEM)照片显示:薄膜表面呈针状晶粒状,而且薄膜表面光滑、致密,均匀性好.测试结果表明:氧化钒薄膜的方块电阻和电阻温度系数(TCR)在20℃分别为50KΩ和-0.021K^-1。

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