全部 标题 作者
关键词 摘要

OALib Journal期刊
ISSN: 2333-9721
费用:99美元

查看量下载量

相关文章

更多...

激光束诱导电流在HgCdTe双色探测器工艺检测中的应用

Keywords: 激光束诱导电流HgCdTe干法刻蚀双色探测器

Full-Text   Cite this paper   Add to My Lib

Abstract:

报道了激光束诱导电流(LBIC)在碲镉汞(HgCdTe)红外双色探测器工艺检测中的应用.通过LBIC测试,发现p型HgCdTe材料由B+离子注入损伤形成的n区面积大于其注入面积,并获得n区横向的精确分布.同时,运用LBIC,获得了p型HgCdTe材料因不同能量的等离子体干法刻蚀诱导的刻蚀台面侧壁工艺损伤形成的n区横向分布,并得到了n区横向宽度与等离子体能量的关系.

References

[1]  Antoni Rogalski. Dual-band infrared focal plane arrays [J].SPIE, 2000, 4340:1-14 .
[2]  Bajaj J, Tennant W E, Zucca R, et al. Spatially resolved characterization of HgCdTe materials and devices by scanning layer microscopy [J]. Semicond. Sci. Technol.,1993,8:872-887.
[3]  Musca C A, Redfern D A, et al. Junction depth measurement in HgCdTe using laser beam induced current(LBIC)[J]. Journal of Electronic Materials,1999,28(6):603-610.
[4]  Antoszewski J, Musca C A, Dell J M. Characterization of HgCdTe n on p-type structures obained by reactive ion etching induced p-to-n conversion [J]. Journal of Electronic Materials,2000,29(6):837-840.
[5]  YE Zhen-Hua, WU Jun, HU Xiao-Wing, et al. Study of integrated MW1/MW2 two-color HgCdTe infrared detetor arrays [J]. J. Infrared Millim Waves (叶振华,吴俊,胡晓宁,等. 集成式HgCdTe红外双色探测器列阵.红外与毫米波学报),2004,23(3):193-196.
[6]  Zanatta J P, Ferret P, Loyer R, et al. Single and two color infrared focal plane arrays made by MBE in HgCdTe [J]. SPIE, 2000, 4130:441-451.
[7]  Terterian S,Chu M,Mesropian M, et al. A comparative study and performance characteristics of ion-implanted and heterojunction short-wave infrared HgCdTe focal-plane arrays [J]. Journal of Electronic Materials,2002,31(7):720-725.
[8]  Ebe H, Tanaka M, Miyamoto Y. Dependency of p-n junction depth on ion species implanted in HgCdTe [J]. Journal of Electronic Materials,1999,28(6):854-857.
[9]  Haakenaasen R, Colin T, Steen H. Electron beam induced current study of ion beam milling type conversion in molecular beam epitaxy vacancy-doped CdxHg1-xTe [J]. Journal of Electronic Materials,2000,29(6):849-852.
[10]  White J, Pal R, Dell J M, et al. P-to-n type-conversion mechanisms for HgCdTe exposed to H2/CH4 plasmas [J]. Journal of Electronic Materials,2001,30(6):762-767.
[11]  Musca C A, Siliquint J F, Smith E P G, et al. Laser beam induced current image of reactive ion etching induced n-type doping in HgCdTe [J]. Journal of Electronic Materials,1998,27(6):661-667.
[12]  Fynn K A, Faraone L. Laser beam induced current(LBIC)spatial imaging as a characterization tool for infrared HgCdTe materials and devices [J]. SPIE, 1995, 2552:134-145.
[13]  JIA Jia, CHEN Gui-Bin, GONG Hai-Mei, et al.Study on the junetions of swir HgCdTe photo diodes at room temperatwre with laser vean ubdyced cyrrent [J]. J. Infrared Millim waves (贾嘉,陈贵宾,龚海梅,等.室温短波碲镉汞结区的LBIC方法研究.红外与毫米波学报), 2005,24(1):11-14.

Full-Text

Contact Us

service@oalib.com

QQ:3279437679

WhatsApp +8615387084133