Bahr D F, Robach J S, Wright J S, et al. Mechanical deformation of PZT thin films for MEMS applications [J]. Materials Science and Engineering A, 1999, 259(1): 126-131.
[2]
Changho Lee, Vasili Spirin, Hanwook Song. Drying temperature effects on microstructure, electrical properties and lectro-optic coefficients of sol-gel derived PZT thin films [J]. Thin Solid Films, 1999, 340(1): 242-249.
[3]
Song Zhitang, Wei Ren, Wang Shixin. Structural and abnormal electrical properties of excess PbO-doped lead lanthanum titanate thin films [J]. Phys.D: Appl. phys., 2000, 33(7):764-772.
[4]
WANG Gen-Shui, HU Zhi-Gao, SHI Fu-Wen, et al. Strucural and optical properties of PbZr0.5Ti0.5O3/La0.5Sr0.5CoO3 multilayer thin films prepared by chemical solution routes [J]. J. Infrared Millim. Waves (王根水,胡志高,石富文,等.化学溶液法制备PbZr0.5 Ti0.5O3/La0.5 Sr0.5 CoO3铁电多层薄膜的结构和光学性质研究.红外与毫米波学报),2003,22(1):23-26.
[5]
Larsen P K, Cuppens R, Spierings G A. Ferroelectric memories [J]. Ferroelectrics, 1992, 128: 265-292.
[6]
Tomita Katsuhiko, Takamuro Daisuke, Samada Kazuaki. Electron emission type infrared imaging sensor using ferroelectric thin plate [J]. Sensors and Actuator A, 2002, 98(1): 147-152.
[7]
Tang X G, Chan H L W, Ding A L. Electrical properties of compositionally graded lead calcium titanate thin films [J]. Solid State Communications, 2003, 127(9-10): 625-628.
[8]
Wang X S, Wang C L, Zhong W L, et al. Temperature graded ferroelectric films described by the transverse Ising model [J]. Physics Letters A, 2001, 285(3-4): 212-216.
[9]
Vilquin B, Poullain G, Bouregba R, et al. Compositionally graded Pb(Zr,Ti)O3 thin films with different crystallographic orientations [J]. Thin Solid Films, 2003, 436(2): 157-161.
[10]
Li Jian-Kang, Yao Xi. Study on a new and rapid heat-treatment process for fabricating lead zirconate titanate thin film [J]. J. Infrared Millimetre Waves (李建康,姚熹. 一种新的铁电薄膜快速热处理工艺的研究. 红外与毫米波学报),2004, 23(2): 91-94.
[11]
Dong-Joo Kim, Piezoelectric and ferroelecyric properties of lead zirconate titanate thin films [D]. PhD Thesis, Univ. of North Carolina State, 2001, 22.
