CHEN Min,LIU Xu,LI Hai-Feng.Finte element analysis of tunable optical filter array based on microstructure technique[J].Acta Optica Sinica (陈旻,刘旭,李海峰.微机构可调谐阵列滤光片的有限元分析.光学学报),2001,30(9):1150-1152.
[3]
LIN Bing,LIU Ding-Quan,KONG Ling-Fang,et al.Fabrication of middle infrared 8-channel micro integrated filters[J].Acta Photonica Sinica (林炳,刘定权,孔令方,等.中波红外8通道微型集成滤光片的研制.光子学报),2005,34(9):1316-1319.
[4]
TANG Jin-Fa,ZHENG Quan.Applied Thin Film Optics[M].Beijing:Press of Beijing Science (唐晋发,郑权.应用薄膜光学,北京:北京科学出版社),1984,244-254.
[5]
GU Pei-Fu,LU Wei,CHEN Hai-Xing,et al.Effect of spectral width of thickneess-monitoring system on performance of narrow-band filters[J].Acta Optica Sinica (顾培夫,陆巍,陈海星,等.膜厚监控系统的光谱宽度对窄带滤光片性能的影响.光学学报),2005,24(2):251-254.
[6]
DONG Feng-Liang,ZHANG Qing-Chuan,et al.Bimaterial micro-cantilever uncooled infrared imaging system-design and fabrication of micro-cantilerver array[J].J.Infrared Millim.Waves (董凤良,张青川,等.双材料微梁阵列非制冷红外成像系统--微梁阵列的设计与制作,红外与毫米波学报),2005,25(6):409-413.
[7]
HUANG Xian-Cheng,YANG Yi-Ming,SHI Jian-Tao,et al.The research of multi-spectral micro-array filters[J].Optical Instruments (黄相成,杨益民,师建涛,等.多光谱微型列阵滤光器的研制.光学仪器),1999,21 (4-5):221-228.
[8]
CHENG Shi-Ping,ZHANG Feng-Shan,YAN Yi-Xun.Study on the technology of preparing micro-infrared filter array by masking and lifting-off method[J].J.Infrared Millim.Waves (程实平,张凤山,严义埙.用掩膜分离法制备微型红外滤光片列阵的工艺研究.红外与毫米波学报),1994,13(2):109-112.
