全部 标题 作者
关键词 摘要

OALib Journal期刊
ISSN: 2333-9721
费用:99美元

查看量下载量

相关文章

更多...
核技术  2015 

高精度气浮支承转动平台结构设计及精度测试

DOI: 10.11889/j.0253-3219.2015.hjs.38.030403, PP. 30403-30403

Keywords: 气浮支承,摩擦轮驱动,精度测试

Full-Text   Cite this paper   Add to My Lib

Abstract:

针对中国散裂中子源(ChineseSpallationNeutronSource,CSNS)多功能反射谱仪反射臂对重负载、大行程及高精度的运动要求,采用气浮支承加摩擦轮驱动的组合结构。先通过气浮支承实现反射臂与地面之间无接触无摩擦,再通过摩擦轮驱动实现反射臂绕着样品台中心进行精确定位运动。为验证该方案的可行性进行气浮支承转动平台样机的研制,并通过对气浮支承转动平台的精度测试得知在全行程范围内其单向重复定位精度为0.00031°,单向定位精度为0.0009°。试验结果表明气浮支承加摩擦轮驱动的结构能够满足多功能反射谱仪反射臂的运动要求。

References

[1]  Neutron reflectometry: a probe for materials surfaces [C]. Proceedings of a technical meeting organized by the International Atomic Energy Agency and held in Vienna, 2004
[2]  李天福,陈东风,刘蕴韬. 中子反射技术及其在薄膜材料研究中的应用[J]. 中国材料进展,2009,28(12):6-9
[3]  LI Tian Fu, CHEN D F, LIU Y T. Neutron Reflectometry and Its Application in studies of Thin Films [J]. MATERIALS CHINA. ,2009, 28(12):6-9
[4]  Fang Shou Xian, Fu Shi Nian, Qin Qin, et al. Physics Parameters And Design Study For The Beijing Spallation Neutron Source[J]. Journal Of The Korean Physical Society, 2006, 48(4):697-702
[5]  WEI Jie, CHEN He Sheng, CHEN Yan Wei, et al. China Spallation Neutron Source: Design,R&D,and outlook [J]. Nuclear Instruments and Methods in Physics Research A:Accelerators, Spectrometers, Detectors and Associated Equipment, 2009, 600(1):10-13
[6]  叶燚玺. 超精密运动平台中气浮支承振动特性的研究[D]. 武汉:华中科技大学,2010
[7]  YE Yi Xi. Vibration characteristic research of ultra-precision motion stage with air bearings supports [D]. Wuhan:Huazhong university of science and technology, 2010
[8]  何学明,陈学东,曾理湛,等. 超精密气浮平台的定位精度分析[J]. 华中科技大学学报(自然科学版),2008,36(3):8-11
[9]  HE Xue Ming,CHEN Xue Dong,ZENG Li Zhan,et al.. Analysis of the positioning accuracy of ultra-precision stage with air-thrust bearings [J]. Huazhong Univ. of Sci. & Tech. (Natural Science Edition),2008,36(3):8-11
[10]  左昊诚,姜伟,张鸣,等. 偏心驱动下气浮支承精密运动平台的稳定性和精度分析[J]. 机械制造与自动化,2014,43(1):11-13
[11]  ZUO Hao Cheng,JIANG Wei,ZHANG Ming,et al.. Stability and accuracy analysis of Precision Motion Stage With Air Bearings Under Eccentric Driving Force [J]. Machine Building & Automation,2014,43(1):11-13
[12]  GB/T17421.2-2000,机床检验通则第二部分:数控轴线的定位精度和重复定位精度的确定[S]
[13]  贾学志,王栋,张雷,等. 轻型空间相机调焦机构的优化设计与精度试验[J]. 光学 精密工程,2011,19(8):1824-1831
[14]  JIA Xue Zhi,WANG Dong,ZHANG Lei,et al.. Optimizing design and precision experiment of focusing mechanism in lightweight space camera [J]. Opt. Precision Eng., 2011,19(8):1824-1831
[15]  刘慧玲,曾韬,刘建湘.数控机床定位精度的测量和评定[J].机械研究与应用,2005,18(6):38-39.
[16]  LIU Hui Lin,ZENG Tao,LIU Jian Xiang. Measurement and Assessment of the error of the numerical control machine tool [J]. Mechanical Research & Application, 2005,18(6):38-39
[17]  冷汹涛.数控机床定位精度和重复定位精度的检验[J].机床与液压,2008,36(8):191-159
[18]  LENG Xiong Tao. Testing of positioning accuracy and repeated positioning accuracy of CNC machine tool [J]. Machine Tool & Hydraulics,2008,36(8):191-159
[19]  毛英泰. 误差理论分析与精度测试[M]. 北京:国防工业出版社,1982
[20]  Mao Ying Tai. Error Theory and Precision Analysis [M]. Beijing: National Defence Industry Press, 1982

Full-Text

Contact Us

service@oalib.com

QQ:3279437679

WhatsApp +8615387084133