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材料工程  2012 

多晶硅定向凝固过程中固-液界面特性研究

, PP. 33-38

Keywords: 多晶硅,固-液界面,拉锭速率,曲率

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Abstract:

通过真空感应熔炼炉以不同拉锭速率制备了多晶硅铸锭,通过对铸锭的金相组织及少子寿命随凝固高度的变化及径向分布的分析,研究了多晶硅定向凝固过程中的固-液界面特性。结果表明少子寿命随生长高度的增加先增加后减少,其径向分布与固-液界面相对应。由少子寿命分布图可以看出,固-液界面的曲率随拉锭速率的减小而减小,固-液界面形貌为胞状界面。计算分析表明,胞状的固-液界面造成Fe杂质的有效分凝系数增加了3个量级以上。

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