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材料工程  2008 

第VI族元素半导体纳米线的可控合成及其纳米电子学器件研究

Keywords: VI族半导体,纳米线,场效应晶体管

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Abstract:

采用化学液相反应,以亚硒酸或者原碲酸为原料,合成出尺寸均匀、高结晶度的硒、碲纳米线。高分辨电镜分析结果表明合成的硒、碲纳米线均为三方晶单晶结构,生长方向沿其螺旋轴即[001]方向生长。结合光刻、电子束刻蚀技术,分别制备了硒、碲纳米线场效应晶体管器件(FET)。对器件测试的结果显示硒和碲纳米线均为p型半导体,其相应的空穴迁移率分别为30.7,70cm2V-1s-1。这对新型纳米线电子学器件的开发应用具有重要意义。

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