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SnO2薄膜与n-SnO2/p-Si异质结光电特性的研究

, PP. 45-48

Keywords: 第一性原理,n-SnO2/p-Si薄膜,脉冲激光沉积法,n-SnO2/p-Si异质结,光电性质

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Abstract:

基于密度泛函理论的第一性原理平面波超软赝势方法，建立SnO2超晶胞模型并进行几何结构优化，对其能带结构进行了模拟计算．结果显示，导带底和价带顶位于G点处，表明SnO2是一种直接带隙半导体．同时，采用脉冲激光沉积法分别在蓝宝石衬底和Si衬底上制备出SnO2薄膜及n-SnO2/p-Si异质结．扫描电镜结果表明，SnO2薄膜晶粒均匀．霍尔测试结果表明，SnO2薄膜载流子浓度高达1.39X1020cm-3．吸收谱测试表明，SnO2薄膜光学带隙为3.37eV．n-SnO2/p-Si异质结的I-V曲线显示出其良好的整流特性．

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[119]  WWANG B, WANG G P.Plasmon Bragg reflectors and nanocavities on flat metallic surfaces[J].Appl Phys Lett,2005,87(1):013107-013109
[120]  HHAN Z H, FORSBERG E, HE S.Surface plasmon Bragg gratings formed in metal-insulator-metal waveguides[J].IEEE Photon Technol Lett,2007,19(2):91-93
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[122]  LIU J Q, WANG L L, HE M D, et al.A wide bandgap plasmonic Bragg reflector[J].Opt Express,2008,16(7):4888-4894
[123]  KRASAVIN V, ZAYATS A V.All-optical active components for dielectric-loaded plasmonic waveguides[J].Opt Commun,2010,283:1581-1584
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[128]  LU H, LIU X M, MAO D, et al.Tunable band-pass plasmonic waveguide filters with nanodisk resonators[J].Opt Express,2010,18(17):17922-17927
[129]  WANG B, WANG G P.Plasmonic waveguide ring resonator at terahertz frequencies[J].Appl Phys Lett,2006,89(13):133106-133108
[130]  LIN X S, HUANG X G.Tooth-shaped plasmonic waveguide filters with nanometeric sizes[J].Opt Lett,2008,33(23):2874-2876
[131]  XIAO S S, LIU L, QIU M.Resonator channel drop filters in a plasmon-polaritons metal[J].Opt Express,2006,14(7):2932-2937
[132]  CHEN P X, LIANG R S, HUANG Q D, et al.Plasmonic filter with sub-waveguide coupled to vertical rectangular resonator structure[J].Opt Commun,2011,284(19):4795-4799
[133]  LI Q, WANG T, SU Y K, et al.Coupled mode theory analysis of mode-splitting in coupled cavity system[J].Opt Express,2010,18(8):8367-8382
[134]  DITLBACHER H, KRENN J R, SCHIDER G, et al.Two-dimensional optics with surface plasmon polaritons[J].Appl Phys Lett,2002,81(10):1762-1764
[135]  JOHNSON P B, CHRISTY R W.Optical constants of the noble metals[J].Phys Rev B,1972,6(12):4370-4379
[136]  CCHEN P X, LIANG R S, HUANG Q D, et al.Plasmonic filters and optical directional couplers based on wide metal-insulator-metal structure[J].Opt Express,2011,19(8):7633-7639
[137]  HHAN Z H, LIU L, FORSBERG E.Ultra-compact directional couplers and Mach-Zehnder interferometers employing surface plasmon polaritons[J].Opt Commun,2006,259:690-695
[138]  VVERONIS G, FAN S.Bends and splitters in metal-dielectric-metal subwavelength plasmonic waveguides[J].Appl Phys Lett,2005,87(13):131102-131104
[139]  WWANG B, WANG G P.Plasmon Bragg reflectors and nanocavities on flat metallic surfaces[J].Appl Phys Lett,2005,87(1):013107-013109
[140]  HHAN Z H, FORSBERG E, HE S.Surface plasmon Bragg gratings formed in metal-insulator-metal waveguides[J].IEEE Photon Technol Lett,2007,19(2):91-93
[141]  HOSSEINI A, MASSOUD Y.A low-loss metal-insulator-metal plasmonic bragg reflector[J].Opt Express,2006,14(23):11318-11323
[142]  LIU J Q, WANG L L, HE M D, et al.A wide bandgap plasmonic Bragg reflector[J].Opt Express,2008,16(7):4888-4894
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[144]  MEI X, HUANG X G, TAO J, et al.A wavelength demultiplexing structure based on plasmonic MDM side-coupled cavities[J].J Opt Soc Am B,2010,27(12):2707-2713
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[147]  ZHANG Q, HUANG X G, LIN X S, et al.A subwavelength coupler-type MIM optical filter[J].Opt Express,2009,17(9):7549-7554
[148]  LU H, LIU X M, MAO D, et al.Tunable band-pass plasmonic waveguide filters with nanodisk resonators[J].Opt Express,2010,18(17):17922-17927
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[150]  LIN X S, HUANG X G.Tooth-shaped plasmonic waveguide filters with nanometeric sizes[J].Opt Lett,2008,33(23):2874-2876
[151]  XIAO S S, LIU L, QIU M.Resonator channel drop filters in a plasmon-polaritons metal[J].Opt Express,2006,14(7):2932-2937
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[171]  LIN X S, HUANG X G.Tooth-shaped plasmonic waveguide filters with nanometeric sizes[J].Opt Lett,2008,33(23):2874-2876
[172]  XIAO S S, LIU L, QIU M.Resonator channel drop filters in a plasmon-polaritons metal[J].Opt Express,2006,14(7):2932-2937
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[184]  MEI X, HUANG X G, TAO J, et al.A wavelength demultiplexing structure based on plasmonic MDM side-coupled cavities[J].J Opt Soc Am B,2010,27(12):2707-2713
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[198]  LIN X S, HUANG X G.Tooth-shaped plasmonic waveguide filters with nanometeric sizes[J].Opt Lett,2008,33(23):2874-2876
[199]  XIAO S S, LIU L, QIU M.Resonator channel drop filters in a plasmon-polaritons metal[J].Opt Express,2006,14(7):2932-2937
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[218]  LIN X S, HUANG X G.Tooth-shaped plasmonic waveguide filters with nanometeric sizes[J].Opt Lett,2008,33(23):2874-2876
[219]  XIAO S S, LIU L, QIU M.Resonator channel drop filters in a plasmon-polaritons metal[J].Opt Express,2006,14(7):2932-2937
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[227]  MEI X, HUANG X G, TAO J, et al.A wavelength demultiplexing structure based on plasmonic MDM side-coupled cavities[J].J Opt Soc Am B,2010,27(12):2707-2713
[228]  HHAN Z H, FORSBERG E, HE S.Surface plasmon Bragg gratings formed in metal-insulator-metal waveguides[J].IEEE Photon Technol Lett,2007,19(2):91-93
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[236]  LU H, LIU X M, MAO D, et al.Tunable band-pass plasmonic waveguide filters with nanodisk resonators[J].Opt Express,2010,18(17):17922-17927
[237]  WANG B, WANG G P.Plasmonic waveguide ring resonator at terahertz frequencies[J].Appl Phys Lett,2006,89(13):133106-133108
[238]  LIN X S, HUANG X G.Tooth-shaped plasmonic waveguide filters with nanometeric sizes[J].Opt Lett,2008,33(23):2874-2876
[239]  XIAO S S, LIU L, QIU M.Resonator channel drop filters in a plasmon-polaritons metal[J].Opt Express,2006,14(7):2932-2937
[240]  CHEN P X, LIANG R S, HUANG Q D, et al.Plasmonic filter with sub-waveguide coupled to vertical rectangular resonator structure[J].Opt Commun,2011,284(19):4795-4799
[241]  LI Q, WANG T, SU Y K, et al.Coupled mode theory analysis of mode-splitting in coupled cavity system[J].Opt Express,2010,18(8):8367-8382
[242]  DITLBACHER H, KRENN J R, SCHIDER G, et al.Two-dimensional optics with surface plasmon polaritons[J].Appl Phys Lett,2002,81(10):1762-1764
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[246]  HHAN Z H, FORSBERG E, HE S.Surface plasmon Bragg gratings formed in metal-insulator-metal waveguides[J].IEEE Photon Technol Lett,2007,19(2):91-93
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[256]  LIN X S, HUANG X G.Tooth-shaped plasmonic waveguide filters with nanometeric sizes[J].Opt Lett,2008,33(23):2874-2876
[257]  XIAO S S, LIU L, QIU M.Resonator channel drop filters in a plasmon-polaritons metal[J].Opt Express,2006,14(7):2932-2937
[258]  CHEN P X, LIANG R S, HUANG Q D, et al.Plasmonic filter with sub-waveguide coupled to vertical rectangular resonator structure[J].Opt Commun,2011,284(19):4795-4799
[259]  LI Q, WANG T, SU Y K, et al.Coupled mode theory analysis of mode-splitting in coupled cavity system[J].Opt Express,2010,18(8):8367-8382
[260]  DITLBACHER H, KRENN J R, SCHIDER G, et al.Two-dimensional optics with surface plasmon polaritons[J].Appl Phys Lett,2002,81(10):1762-1764
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[266]  GGENET C, EBBESEN T W.Light in tiny holes[J].Nature,2007,445(7123):39-46
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[273]  ZHANG Q, HUANG X G, LIN X S, et al.A subwavelength coupler-type MIM optical filter[J].Opt Express,2009,17(9):7549-7554
[274]  HHAN Z H, LIU L, FORSBERG E.Ultra-compact directional couplers and Mach-Zehnder interferometers employing surface plasmon polaritons[J].Opt Commun,2006,259:690-695
[275]  VVERONIS G, FAN S.Bends and splitters in metal-dielectric-metal subwavelength plasmonic waveguides[J].Appl Phys Lett,2005,87(13):131102-131104
[276]  LU H, LIU X M, MAO D, et al.Tunable band-pass plasmonic waveguide filters with nanodisk resonators[J].Opt Express,2010,18(17):17922-17927
[277]  WANG B, WANG G P.Plasmonic waveguide ring resonator at terahertz frequencies[J].Appl Phys Lett,2006,89(13):133106-133108
[278]  LIN X S, HUANG X G.Tooth-shaped plasmonic waveguide filters with nanometeric sizes[J].Opt Lett,2008,33(23):2874-2876
[279]  WWANG B, WANG G P.Plasmon Bragg reflectors and nanocavities on flat metallic surfaces[J].Appl Phys Lett,2005,87(1):013107-013109
[280]  XIAO S S, LIU L, QIU M.Resonator channel drop filters in a plasmon-polaritons metal[J].Opt Express,2006,14(7):2932-2937
[281]  HHAN Z H, FORSBERG E, HE S.Surface plasmon Bragg gratings formed in metal-insulator-metal waveguides[J].IEEE Photon Technol Lett,2007,19(2):91-93
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[290]  WANG B, WANG G P.Plasmonic waveguide ring resonator at terahertz frequencies[J].Appl Phys Lett,2006,89(13):133106-133108
[291]  LIN X S, HUANG X G.Tooth-shaped plasmonic waveguide filters with nanometeric sizes[J].Opt Lett,2008,33(23):2874-2876
[292]  XIAO S S, LIU L, QIU M.Resonator channel drop filters in a plasmon-polaritons metal[J].Opt Express,2006,14(7):2932-2937
[293]  CHEN P X, LIANG R S, HUANG Q D, et al.Plasmonic filter with sub-waveguide coupled to vertical rectangular resonator structure[J].Opt Commun,2011,284(19):4795-4799
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