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压痕法和十字交叉法评价类金刚石硬质涂层的界面结合强度

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Abstract:

涂层与基体界面结合强度是硬质涂层材料一个关键的性能指标。应用压痕法和十字交叉法测试了硅基/类金刚石(diamond-likecarbon,DLC)涂层的界面结合强度。结果表明利用Vickers压痕法和Hertz压痕法测量所得硅基/DLC涂层的临界载荷分别为0.981N和300N。用Vickers压痕法测量时,载荷达到临界载荷后涂层将产生环状开裂,当载荷进一步增大时,还会产生径向裂纹;对于Hertz压痕法,载荷从300N增加到800N时,涂层环状裂纹从1个增加到4个。通过采用十字交叉法测量得到硅基/DLC涂层界面拉伸强度和剪切强度分别为(8.9±2.7)MPa和(20.1±2.6)MPa,表明该涂层抗剪切性能良好,拉伸分离后界面比剪切分离后界面的均匀性更好。压痕法和十字交叉法评价硬质涂层的界面强度简单易行,结果准确,具有广泛的应用前景。

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