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非水解溶胶–凝胶法制备钛酸铝薄膜及其抗熔盐腐蚀性能

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Abstract:

采用非水解溶胶–凝胶工艺,以无水三氯化铝和四氯化钛为前驱体,乙醇为氧供体,环保型高沸点二元酸酯混合物AGSE为溶剂,四丁基溴化铵为稳定剂,在碳化硅基片上制备出均匀、致密的钛酸铝薄膜。借助差热–热重、X射线衍射、场发射扫描电镜和扫描电镜等研究了钛酸铝干凝胶热处理过程中的相变化、钛酸铝薄膜的晶相组成、显微结构及其抗硝酸钠熔体腐蚀性能。结果表明在750℃低温制备的钛酸铝薄膜晶粒约为10nm,薄膜具有良好的抗硝酸钠熔体腐蚀性能;热处理温度提高到1350℃后,钛酸铝薄膜的晶粒增大至120nm左右,晶界面积急剧减小,无定形相消失,钛酸铝薄膜的抗硝酸钠熔体侵蚀性能大大提高。

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