全部 标题 作者
关键词 摘要

OALib Journal期刊
ISSN: 2333-9721
费用:99美元

查看量下载量

相关文章

更多...

残余碳对碳化硅陶瓷光学表面加工性能的影响

Full-Text   Cite this paper   Add to My Lib

Abstract:

为深入了解碳化硅陶瓷的光学表面加工性能,采用常压固相烧结法制备了碳化硅陶瓷,在保证致密度的前提下,通过改变碳的含量,研究了残余碳对SiC陶瓷抛光面的表面质量和光学性能的影响。研究发现,C的质量含量为3%~7%时,SiC陶瓷抛光表面的RMS(rootmeansquare)粗糙度均约为2nm。当C含量为3%~6%时,SiC陶瓷抛光表面在400~750nm波段的全反射率、漫反射率和镜面反射率无明显变化;当C含量升至7%时,全反射率稍有降低,漫反射率稍有上升,镜面反射率稍有降低。其原因可能是过多的残余碳引起SiC陶瓷的折射率下降和产生光学散射,最终造成镜面反射率降低。

References

[1]  PARSONAGE T B.Selecting mirror materials for high-performance optical system[J].Proc SPIE,1990,1335:119-126. [2]PAQUIN R A.Materials for mirror systems:an overview[J].Proc SPIE,1995,(2543):2-11. [3]PROCHAZKA S,SCANLAN R M.Effect of boron and carbon on sintering of SiC[J].J Am Ceram Soc,1975,58:72-72. [4]BOUGOIN M,DENY P.The SiC technology is ready for the next generation of extremely large telescopes[J].Proc SPIE,2004,(5494):9-18. [5]佘继红,江东亮.碳化硅陶瓷的发展与应用[J].陶瓷工程,1998,(3):3-11,28.SHE Jihong,JIANG Dongliang.Ceram Eng(in Chinese),1998,(3):3-11,28. [6]BRUGGEMANN R,REINIG P,HOLLING M.Thickness dependence of optical scattering and surface roughness in microcrystalline silicon[J].Thin Solid Films,2003,427:358-361. [7]DERICIOGLU A F,KAGAWA Y.Effect of grain boundary micro-cracking on the light transmittance of sintered transparent MgAl2O4[J].J Eur Ceram Soc,2003,23(6):951-959. [8]LAI F C,LI M,WANG H Q,et al.,Optical scattering characteristic of annealed niobium oxide films[J].Thin Solid Films,2005,488:314-320.

Full-Text

Contact Us

service@oalib.com

QQ:3279437679

WhatsApp +8615387084133