TUMMALA R R. Ceramic and glass-ceramic packaging in the 1990S [J]. J Am Ceram Soc, 1991, 74(5): 895–908. [2] 王睿, 王悦辉, 周济, 等. 低温共烧陶瓷技术及其应用[J]. 硅酸盐学报, 2007, 35(suppl 1): 590–593. WANG Rui, WANG Yuehui, ZHOU Ji, et al. J Chin Ceram Soc (in Chinese), 2007, 35(suppl 1): 590–593. [3] IMANAKA Y. Multilayered low Temperature Co-Fired Ceramic (LTCC) Technology [M]. New York: Springer, 2005: 21–23. [4] SCRANTOM C Q, LAWSON J C. LTCC technology: where we are and where we′re going-II [J]. In IEEE Symp Technol Wireless Appl, 1999:193–200. [5] JANTUNEN H, KANGASVIERI T, V?H?KANGAS J, et al. Design aspects of microwave components with LTCC technique [J]. J Eur Ceram Soc, 2003, 23(14): 2541–2548. [6] DERNOVSEK O, NAEINI A, PREU G, et al. LTCC glass-ceramic composites for microwave application [J]. J Eur Ceram Soc, 2001, 21(10/11): 1693–1697. [7] HAN S M, AYDIL E S. Reasons for lower dielectric constant of fluorinated SiO2 films [J]. J Appl Phys, 1998, 83(4): 2172–2178. [8] HAN S S, KIM H R, BAE B S. Deposition of fluorinated amorphous carbon thin films as a low-dielectric-constant material [J]. J Electro-chem Soc, 1999, 146(9): 3383–3388. [9] WANG R, ZHOU J, ZHAO H J, et al. Oxyfluoride glass-silica ceramic composite for low temperature co-fired ceramics [J]. J Eur Ceram Soc, 2008, 28(15): 2877–2881. [10] WANG R, ZHOU J, LI B, et al. CaF2–AlF3–SiO2 glass-ceramic with low dielectric constant for LTCC application [J]. J Alloys Compd, 2010, 490(1/2/4): 204–207. [11] TULYAGANOV D U, AGATHOPOULOS S, FERNANDES H R, et al. Processing of glass-ceramics in the SiO2–Al2O3–B2O3–MgO–CaO– Na2O–(P2O5)–F system via sintering and crystallization of glass pow-der compacts [J]. Ceram Int, 2006, 32(2): 195–200.