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Al-Sc共掺杂ZnO透明导电薄膜的掺杂机制

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Abstract:

采用溶胶-凝胶法制备Al-Sc共掺杂ZnO透明导电薄膜,考察了结晶性、晶界状态、紫外-可见光透射光谱及Hall效应,并讨论其掺杂机制,结果表明Sc单独掺杂时,晶粒尺寸变小,结晶性变差,晶粒表面包裹一层非晶相,透射光谱存在较大的吸收谷,无导电性;Al-Sc共掺杂时,晶粒表面无非晶相,c轴择优取向性和晶界状态变优,透射光谱无大的吸收谷,载流子迁移率比Al掺杂ZnO薄膜增大约1个数量级。

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