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LaNiO3缓冲层厚度对Ca0.4Sr0.6Bi4Ti4O15薄膜结构和电性能的影响

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Abstract:

利用溶胶–凝胶法在Si(100)衬底上制备了具有(110)取向的LaNiO3薄膜,然后在LaNiO3/Si(100)上制备了Ca0.4Sr0.6Bi4Ti4O15(Ca0.4Sr0.6BTi)薄膜。研究了LaNiO3缓冲层厚度对Ca0.4Sr0.6BTi薄膜结构和电性能的影响。结果表明,当引入LaNiO3厚度为250nm时,Ca0.4Sr0.6BTi薄膜(200)面衍射峰择优取向最明显,即薄膜样品的(200)与(119)面衍射峰的相对强度I(200)/I(119)最大,为1.20;Ca0.4Sr0.6BTi薄膜的相对介电常数最大为230,介电损耗因子(tanδ)为0.068,剩余极化强度为17.5μC/cm2,矫顽电场为84.6kV/cm。

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