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基于紫外光辐照改性自组装单层膜图案化表面的铁酸铋薄膜制备与表征

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Abstract:

采用自组装单层膜(self-assembledmonolayers,SAMs)技术在玻璃基板表面制备了十八烷基三氯硅烷(octadecyltrichlorosilane,OTS)-SAMs,将OTS-SAMs基体在光掩膜覆盖下用紫外光进行刻蚀,得到含有亲水性和疏水性区域的模板,利用液相沉积法在OTS-SAMs模板表面制备了铁酸铋(BiFeO3)图案化薄膜。通过接触角仪、原子力显微镜、X射线衍射、扫描电镜、X射线能谱仪等测试手段对OTS膜和BiFeO3薄膜进行表征。结果表明以OTS为模板利用液相沉积法制备出边缘轮廓清晰、粗糙度较小,与基板结合力较强,条纹宽度为10~20μm的BiFeO3图案化薄膜。

References

[1]  HILL N A.Why are there so few magnetic ferroelectrics[J].J Phys Chem B,2000,104:6694-6709 [2]WANG J,NEATON J B,ZHENG H,et al.Epitaxial BiFeO3multifer-roic thin film heterostructure[J].Science,2003,299:1719-1722. [3]RAO B U M,SRINIVASAN G.Effects of high-temperature annealing on amorphous BiFeO3with nonmagnetic substitutions[J].Appl Phys Lett,1991,58(21):2441-2443. [4]NAGAYAMA H,HONDA H,KAWAHARA H.A new process for silica coating[J].J Electrochem Soc,1988,135(8):2013-2016. [5]XIA Y.,ZHAO X M,WHITESIDES G M.Pattern transfer:Self-asse-mbled monolayers as ultrathin resists[J].Microelectron Eng,1996,32:255-268 [6]XIA Y,ZHAO X M,KIM E,et al.A selective etching solution for use with patterned self-assembled monolayers of alkanlenthiolates on Au,Ag and Cu[J].Chem Mater,1995,12:2332-2337. [7]KUMAR A,BIEBUYCK H A,WHITESIDES G M.Patterning self-assembled monolayers[J].Appl Mater Sci Langmuir,1994,10:1498-1511. [8]齐西伟,周济,岳振星,等.铁电/铁磁复合材料的磁性和介电性能研究[J].电子元件与材料,2002,22(4):3-5.QI Xiwei,ZHOU Ji,YUE Zhenxin,et al.Electron Compon Mater(in Chinese),2002,22(4):3-5. [9]GAO Y F,KOUMOTO K.Bioinspired ceramic thin film processing,present status and future perspectives[J].Cryst Growth Des,2005,5(5):1983-2017 [10]SHIRAHATA N,MASUDA Y,YONEZAWA T,et al.Control over film thickness of SnO2ultrathin film selectively deposited on a patterned self-assembled monolayer[J].Langmuir,2002,18(26):10379-10385.

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