全部 标题 作者
关键词 摘要

OALib Journal期刊
ISSN: 2333-9721
费用:99美元

查看量下载量

相关文章

更多...

氧化铝陶瓷表面化学气相沉积钛涂层的制备及性能

DOI: 10.7521/j.issn.0454-5648.2014.07.04

Full-Text   Cite this paper   Add to My Lib

Abstract:

利用卤化物还原原理,以Ti粉和I2粉为反应原料,通过化学气相沉积的方法在Al2O3陶瓷基体上制备了金属Ti涂层。考察了原料配比、加热温度及保温时间等工艺参数对涂层沉积的影响。通过X射线衍射仪分析了涂层的物相组成。利用扫描电子显微镜及能谱仪对涂层的微观组织形貌及成分进行了分析。采用座滴法考察铜与沉积了涂层的氧化铝陶瓷间的润湿性。研究结果表明,化学气相沉积法在氧化铝陶瓷表面制备Ti涂层的适宜工艺参数为Ti与I2的质量比=1∶3,沉积温度为1100℃,沉积时间为60min。所获得的Ti涂层纯度较高,具有明显的(110)晶面择优取向性,涂层与陶瓷结合良好。铜与涂层间的润湿角在1113℃时为57°。

References

[1]   SCHERM F, VOLKL R, NEUBRAND A, et al. Mechanical characterisation of interpenetrating network metal-ceramic composites[J]. Mater Sci Eng A, 2010, 527: 1260-1265.
[2]   茹红强,曲翔宇,马丽萍,等.三维网络SiC陶瓷/金属复合材料摩擦性能的研究[J].东北大学学报,2008,29(1): 69-72.
[3]  RU Hongqiang, Qu Xiangyu, Ma Liping, et al. J Northeast-ern Univ (in Chinese), 2008, 29(1): 69-72.
[4]   CREE D, PUGH M. Production and characterization of a three-dimensional cellular metal-filled ceramic composite[J]. J Mater Process Technol, 2010, 210: 1905-1917.
[5]   SANG K, WEILER L, Aulbach E. Wetting and pressureless infiltration in the CuTi/Al2O3 system under poor vacuum[J]. Ceram Int, 2010, 36 719-726.
[6]   LEMSTER K, DELPORTE M, GRAULE T, et al. Activation of alumina foams for fabricating MMCs by pressureless infiltration [J]. Ceram Int, 2007, 33(7): 1179-1185.
[7]   杨少锋,陈维平,韩孟岩,等.无压浸渗制备含镍陶瓷/铁基合金复合材料微观组织及浸渗机理.功能材料,2011, 42(3): 486-489.
[8]  YANG Shaofeng, CHEN Weiping, HAN Mengyan, et al. J Funct Mater(in Chinese), 2011, 42(3): 486-489.
[9]   XIA J, CARMELA A-W. Chemical vapor deposition of Ti-W-C thin films[J]. Surface Coatings Technol, 2001, 148( 2-3): 262-267.
[10]   KUO D, LIAO W. Ti-N, Ti-C-N, Ti-Si-N coatings obtained by APCVD at 650~800℃[J]. Appl Surface Sci, 2002, 199: 278-286.
[11]   OHBA Y, HATAYAMA K, SAKAMOTO H. Ti film deposition by metal chloride reduction CVD [C]. Advanced Metallization Conference (AMC) 2004, CA, USA, 2004: 719-724.
[12]   梁佰战,李武斌,曾英,等.CVD高纯钛成核热动力学及钛沉积速率分析.真空,2011, 48(1): 46-50.
[13]  LIANG Baizhan, LI Wubin, ZENG Ying, et al. Vacuum (in Chinese), 2011, 48(1): 46-50.
[14]   TSYGANENKO A A. Structure and properties of hydroxylated surface of oxides[J]. React Kinet Catal Lett, 1993,Vol. 50(1-2): 33-38.
[15]   高广睿,杜继红,李争显,等.化学气相沉积方法制备定向W涂层研究[J].硬质合金,2010, 27 (1): 33-36.
[16]  GAO Guangrui, DU Jihong, LI Zhengxian, et al. Cem Carb (in Chinese), 2010, 27 (1): 33-36.
[17]   闻立时,姜辛,斯重遥.Ti-N涂层晶体择优取向的电子衍射法研究[J].无机材料学报,1986, 1(4): 367-373.
[18]  WEN Lishi, JIANG Xin, SI Chongyao.Electron diffraction study on preferred orientation of Ti-N coatings[J]. J Inorg Mater (in Chinese), 1986, 1(4): 367-373.
[19]   黄若轩,孙鹏,朱芳萍,等.Zr1-xSixN纳米涂层的制备及其力学性能[J].硅酸盐学报,2010, 38(10): 1886-1890.
[20]  HUANG Ruoxuan, SUN Peng, ZHU Fangping, et al. J Chin Ceram Soc, 2011, 39(11): 1886-1890.
[21]   黄若轩,孙鹏,朱芳萍,等.氮气流量对磁控溅射ZrN纳米涂层结构及硬度的影响[J].西安交通大学学报,2011, 45(1): 137-140.
[22]  HUANG Ruoxuan, SUN Peng, ZHU Fangping, et al. J Xi’ Jiaotong Univ (in Chinese), 2011, 45(1): 137-140.
[23]  

Full-Text

Contact Us

service@oalib.com

QQ:3279437679

WhatsApp +8615387084133