|
OALib Journal期刊
ISSN: 2333-9721
费用：99美元
|
|
|
|
由光敏性全氢聚硅氮烷制备透明高硬Si—O微/纳米结构压印模板
DOI: 10.3724/SP.J.1105.2012.11062, PP. 56-62
Keywords: 全氢聚硅氮烷,光敏,水解,微/纳米结构,压印模板
Abstract:
面向可用作压印模板的透明高硬微/纳米结构的低成本制备,无机高分子全氢聚硅氮烷用甲基丙烯酸(2-异氰酸基乙酯)进行光敏改性,经FTIR,1H-NMR,13C-NMR等手段表征,推断获得的是甲基丙烯酸酯化的全氢聚硅氮烷(MPHPS),并以此为原料,用一种含氟聚合物(FP)模板,施加0.1~0.4MPa的压力,紫外压印制备MPHPS的微结构,发现增加压力,压印复制效果提高,0.23MPa可以完全复制FP模板的微结构.此外,在0.4MPa的压力下也制备了分辨率为90nm,70nm的纳米级结构.随后在碱性条件下室温水解,MPHPS聚合物结构转化为Si—O无机结构,最终获得透明高硬结构,硬度4.5×103MPa,弹性模量115×103MPa.
| [1] | 1 Chiu G, Shaw J M.IBM J Res Develop,1997,41:3~6
|
| [2] | 2 Okazaki S.J Vac Sci Technol B,1991,9:2829~2833
|
| [3] | 7 Duan X,Zhao Y,Perl A,Berenschot E,Reinhoudt D N,Huskens J.Adv Mater,2009,21:1~5
|
| [4] | 8 Willson C G.J Vac Sci Technol B,2001,19:2806~2810
|
| [5] | 9 Bender M,Otto M,Hadam B,Vratzov B,Spangenberg B,Kurz H.Microelectron Eng,2000,53:233~236
|
| [6] | 13 Saito R,Kobayashi S,Hayashi H,Shimo T,Saito R,Kobayashi S,Hayashi H,Shimo T.J Appl Polym Sci,2007,104:3388~3395
|
| [7] | 14 Saito R,Kuwano K,Tobe T.J Macromol Sci Pure Appl Chem,2002,39:171~182
|
| [8] | 15 Li Yihe(李义和),Wang Hao(王浩),Li Xiaodong(李效东),Kim Dongp(金东杓).Acta polymerica sinica(高分子学报),2008,(4):350~355
|
| [9] | 16 Perumal J,Lee J J,Kim D P.J Nanosci Nanotechnol,2008,8:5341~5346
|
| [10] | 17 Pham T A,Kim D P,Lim T W,Park S H,Yang D Y,Lee K S.Adv Func Mater,2006,16:1235~1241
|
| [11] | 18 Ye G,Wang X.Biosens Bioelectron,2010,26:772~777
|
| [12] | 20 Wu S,Straub M,Gu M.Polymer,2005,46:10246~10255
|
| [13] | 21 Choi S J,Yoo P J,Baek S J,Kim T W,Lee H H.J Am Chem Soc,2004,126:7744~7745
|
| [14] | 3 Ma Z,Klymyshyn D.M,Achenbach S,Borner M,Dambrowsky N,Mohr J.IEICE Trans Electron,2007,E90-C:2192~2197
|
| [15] | 4 Wu B,Kumar A.J Vac Sci Technol B,2007,25:1743~1746
|
| [16] | 5 Chou S Y,Krauss P R,Renstrom P J.Science,1996,272:85~87
|
| [17] | 6 Chou S Y,Krauss P R,Renstrom P J.Appl Phys Lett,1995,67:3114~3116
|
| [18] | 10 Chou S Y,Keimel C,Gu J.Nature,2002,417:835~837
|
| [19] | 11 Kim J,Kim M,Lee M J,Lee J S,Shin K,Kim Y S.Adv Mater,2009,21:1~4
|
| [20] | 12 Kamiya K,Hashimoto T T,Nasu H,Shimizu Y.Res Rep Fac Eng Mie Univ,2001,26:23~31
|
| [21] | 19 Hwang C M,Sim W Y,Lee S H,Foudeh A M,Bae H,Lee S H,Khademhosseini A.Biofabrication,2010,2:045001
|
| [22] | 22 Yokota H,Imanari N,Sogahara Y.Appl Organomet Chem,2010,24:608~611
|
Full-Text
|
|
Contact Us
service@oalib.com QQ:3279437679 
WhatsApp +8615387084133
|
|
