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DBD等离子体反应器高频电源下的放热研究

Keywords: 介质阻挡放电,温度,能量模型,高频

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Abstract:

通过实验监测DBD(dielectricbarrierdischarge)温度变化情况,探讨了温升所引起的热转移机理,得出DBD热变化表达式,并推导出相应的能量分配式及ΔTave计算式.实验结果表明:高频放电过程中,DBD反应器温度随电压升高和时间延长而上升,它们之间呈非线性关系;DBD反应器温度随频率提高和时间延长而升高,随气体速度的提高而降低,温度变化与时间、频率及气体速度均呈现出线性关系.

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