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半导体激光阵列快轴准直特性

Keywords: 半导体激光阵列,准直,发散角,光线传输矩阵,CCD成像

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Abstract:

为解决大功率半导体激光阵列快轴准直镜装调缺乏定量研究的问题,利用光线传输矩阵法和CCD成像法,获得其准直后光束的指向和发散角.对比半导体远场特性分析仪测量准直后的残余发散角可知,利用光线传输矩阵法和CCD成像法测量角度,测量误差可以控制在13%以内,CCD成像法可作为调整半导体激光阵列准直的有效监测手段.同时,测试6个自由度上准直镜的位置对快轴准直的影响,分析各轴上准直镜位置的允许偏差量,为全自动装调快轴准直镜的算法优化提供了实验基础.结果表明:快轴准直镜装调对各轴运动精度要求不同,尤其对y轴运动精度要求最高.

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