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宽温区高热稳定性SiGeHBT的基区优化设计

Keywords: SiGe异质结双极型晶体管(HBTs),温度敏感性,杂质浓度分布,Ge组分分布

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Abstract:

为了提高SiGe异质结双极型晶体管(heterojunctionbipolartransistors,HBTs)电流增益和特征频率温度热稳定性,首先研究基区杂质浓度分布对基区Ge组分分布为矩形分布的SiGeHBT电流增益和特征频率温度敏感性的影响,基区峰值浓度位置逐渐向集电极靠近可削弱器件的电流增益和特征频率对温度变化的敏感性.随后在选取基区峰值杂质浓度靠近集电极处分布的基础上,研究基区Ge组分分布对SiGeHBT的电流增益和特征频率温度敏感性的影响,减小基区发射极侧Ge组分和增加基区Ge组分梯度可削弱SiGeHBT的电流增益对温度变化的敏感性,增加基区发射极侧Ge组分的摩尔分数和减小基区Ge组分梯度可削弱SiGeHBT的特征频率对温度变化的敏感性.在此研究结果基础上,提出了一种新型基区Ge组分分布的SiGeHBT,它拥有较高的电流增益和特征频率且其温度敏感性较弱.

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