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微尺度下速度滑移对空气静压导轨性能影响

Keywords: 微尺度,空气静压导轨,气膜波动,承载力,刚度

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Abstract:

为了阐释空气静压导轨气膜间隙处在微小尺度所体现的特性,引入气体稀薄效应中的速度滑移算法到Navier-Stokes方程,推导出体现微尺度条件下空气膜流动特点的雷诺方程,进而对气膜内的压强分布进行了仿真分析,根据得到的压强分布计算气膜承载力和刚度随气膜厚度变化的规律,通过试验对得出的结论进行了间接验证,与分析结果吻合.

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