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氧环境扫描电镜对氧化物的荷电补偿

Keywords: 氧环境,扫描电镜,氧化物,荷电补偿

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Abstract:

在(5×10~(-3))~(2×10~(-2))Pa的氧环境扫描电镜(SEM)中观察到由入射电子束辐照引起的Al_2O_3、SiO_2等氧化物荷电现象得以减轻。氧化物受激氧解吸,使样品表面的氧空位成为荷电势阱而产生荷电。通过氧气氛中提供的氧离子对表面缺陷的修复作用,使氧化物的荷电现象得到补偿。氧环境扫描电子显微分析方法是针对氧化物类绝缘材料荷电的一种简便的、自动调节的荷电补偿方法。Al_2O_3的俄歇电子能谱证明,在6×10~(-6)Pa的氧压下可以完全消除Al_2O_3的表面荷电。

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