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ZnO紫外光电导型探测器的制备与研究

Keywords: 氧化锌,单晶薄膜,紫外光探测器

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Abstract:

通过在MOCVD方法生长的ZnO薄膜上沉积Al/Au叉指状电极制得ZnO紫外光电导型探测器,对该探测器的欧姆接触特性、光电响应特性以及光谱响应特性进行了测试研究,并根据AES、XPS分析结果对测试结果进行了理论分析.结果表明,即使在未进行合金工艺的情况下,非合金Al/ZnO金属体系与n型ZnO也可以形成良好的欧姆接触,正向偏压下,探测器的暗电流与光电流随外加偏压线性增加;探测器对紫外光潜具有明显的响应,其响应截止波长为368nm.XPS分析表明,在ZnO薄膜表面存在着一定的O空位和Zn间隙,非化学计量的O与Zn之比对器件的响应时间有影响.

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