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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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离子束溅射制备立方C-N化合物
, PP. 1201-1204
Keywords: C－N化合物,离子束溅射
Abstract:
用氮离子束分别原位溅射Ｔｉ和石墨靶的方法制备了ＣＮｘ／ＴｉＮｙ多层膜.用Ｘ射线光电子谱分析ＣＮｘ层中Ｃ和Ｎ的键合状态,用透射电镜观察薄膜中的相形貌,用电子衍射和Ｘ射线衍射的方法分析相的结构.结果表明,ＣＮｘ层中主要有Ｎ－ｓｐ＾２Ｃ和Ｎ－ｓｐ＾３Ｃ两种键合状态,薄膜中观察到的Ｃ－Ｎ化合物尺寸为１０－６０ｎｍ的晶体颗粒,其衍射数据可用立方Ｃ３Ｎ４结构标定,证实了该薄膜中存在立方Ｃ３Ｎ４化合物.
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