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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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Ti,C超过饱和固溶铝基复合薄膜的微结构和力学性能
DOI: 10.3724/SP.J.1037.2012.00562, PP. 320-324
Keywords: 铝基复合薄膜,微结构,过饱和固溶,力学性能,磁控溅射
Abstract:
采用Al和TiC靶通过磁控共溅射方法制备了Ti∶C≈1的不同Ti和C含量的铝基复合薄膜,研究了Ti和C含量对薄膜微观结构和力学性能的影响.结果表明Ti和C的共同加入使复合薄膜形成了同时具有置换固溶和间隙固溶特征的“双超”过饱和固溶体,复合薄膜的晶粒尺寸在较低的溶质含量下就迅速减小到100nm以下,并随溶质含量的增加继续减小.相应地,薄膜的硬度也从纯Al的1.3GPa迅速提高,在含0.6%(Ti,C)时可达到2.1GPa,并在含6.4%(Ti,C)时达到最高值7.0GPa.随溶质含量的进一步提高,复合薄膜逐渐呈现非晶态,硬度也略有降低.研究结果显示了Ti和C双超过饱和固溶对铝基薄膜具有显著的晶粒细化作用和强化效果.
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