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OALib Journal期刊
ISSN: 2333-9721
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TaN／TiN和TaWN／TiN多晶超晶格薄膜的微结构与超硬效应
, PP. 1214-1218
Keywords: 超晶格薄膜,晶格错配度,超硬效应
Abstract:
通过磁控反应溅射仪制备了ＴａＮ／ＴｉＮ和ＴＡｗｎ／ＴｉＮ多晶超晶格薄膜.采用Ｘ射线衍射仪.透射电子显微镜和显微硬度仪对超格薄膜的微结构和硬度进行了分析.
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