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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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反应磁控溅射法制备nc－TiN／a－Si3N4薄膜的Young’s模量和内耗
, PP. 1193-1196
Keywords: 纳米TiN／非晶Si3N4薄膜
Abstract:
利用振簧技术测量了不同退火状态下的nc-TiN／a-Si3N4超硬薄膜的Young's模量和内耗随温度的变化关系．在280--300℃附近观察到一个弛豫内耗峰．随着退火温度的升高，该内耗峰逐渐减弱，而Young's模量变化不大，750℃退火后，该内耗峰消失，而模量却从未退火时的430GPa激增至530GPa，初步认为该内耗峰来源于非稳定界面的弛豫过程.
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